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发明名称
摘要
申请公布号
JP2965259(B2)
申请公布日期
1999.10.18
申请号
JP19890334808
申请日期
1989.12.26
申请人
TOSHIBA KK
发明人
UEDA TOSHIAKI
分类号
H01L27/04;H01L21/82;H01L21/822;H01L27/118;(IPC1-7):H01L21/82
主分类号
H01L27/04
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