| 摘要 |
<p>A profilometer for measuring a surface profile of a measuring target has a lighting device for irradiating the measuring target with light, an imaging device for imaging a reflected light from the measuring target, and a normal calculation section for calculating a normal direction of a surface at each position of the measuring target from an imaged image. The lighting device has a light emission region of a predetermined extent. A radiance of center of gravity of a light source distribution of a point symmetric region coincides with a radiance of the center of the point symmetric region in an arbitrary point symmetric region of the light emission region.</p> |
