| 摘要 |
PROBLEM TO BE SOLVED: To control the thickness of a resin and to hold a shape at the time of mold release to high accuracy. SOLUTION: Respective position detectors 10, 11, 12 are built in a mold 4 and strain gauges 13, 14, 15 are provided in the mold and, when the mold 4 is pressed to a substrate 2 on which a UV cured resin 3 is placed, the intervals between the mold 4 and the substrate 2 are detected by the position detectors 10, 11, 12 and the strains generated by pressing force are detected by the strain gauges 13, 14, 15 to drive respective piezoelectric actuators 18, 19, 20 through a control unit 17 to control the thickness of the UV cured resin 3 and the strain generated corresponding to the force applied to the mold 4 at a time of mold release is detected to control the release direction of the mold 4. |
