MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method for manufacturing an array substrate used in a liquid crystal display device. The method includes the steps of: a) forming gate electrodes on a substrate; b) forming a gate insulation layer on the substrate including the gate electrodes; c) forming a semiconductor layer (n+a-Si:H and a-Si:H) on the gate insulation layer; d) forming source/drain electrodes on the semiconductor layer; and e) forming pixel electrodes connected to the drain electrodes. The a) and d) steps include the steps of etching a copper-based metal film to form the respective electrodes. The etching liquid composite used in the etching process includes a citric acid as a process number improver.