| 发明名称 |
TOOL FOR USE WITH DUAL-SIDED CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER |
| 摘要 |
<p>A tool includes a holder configured to couple to a dual-sided chemical mechanical planarization (CMP) pad conditioner. The holder has a magnetic material, a first magnetic field strength (H1) at a first face, and a second magnetic field strength (H2) at a second face opposite the first face. The first magnetic field strength (H1) is different than the second magnetic field strength (H2).</p> |
| 申请公布号 |
KR20150005661(A) |
申请公布日期 |
2015.01.14 |
| 申请号 |
KR20147033029 |
申请日期 |
2013.05.03 |
| 申请人 |
SAINT-GOBAIN ABRASIVES, INC.;SAINT GOBAIN ABRASIFS |
发明人 |
ROTHENBERG MICHAEL;HWANG TAEWOOK;CYR PAUL;PYTEL RACHEL Z.;VEDANTHAM RAMANUJAM;RAMANATH SRINIVASAN |
| 分类号 |
H01L21/304;B24B37/28 |
主分类号 |
H01L21/304 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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