MULTIDIRECTIONAL ELECTROMAGNETIC WAVE IRRADIATION SYSTEM OF WORKPIECE AND LASER MATERIAL PROCESSING SYSTEM EMPLOYING IT

摘要

A system 100 for multidirectional electromagnetic wave irradiation of an object to be processed in accordance with the present invention has at least one of a side face irradiation prism system 145A and so on capable of irradiating a top face and one, two or more side faces of an object 11 to be processed with electromagnetic waves from an electromagnetic wave generation source 200, and a bottom face irradiation prism system 185F capable of irradiating a bottom face of the object 11 to be processed with electromagnetic waves. The side face irradiation prism system 145A and so on have an optical path direction changing prism 14A and so on, and are placed so that each of the optical paths through which electromagnetic waves entering the optical path from above travel extends via the optical path direction changing prism 14A or the like to reach sideways the side face of the object 11 to be processed, without being obstructed. The electromagnetic wave generation source is arranged so as to be able to generate electromagnetic waves from right above each of the prism system 145A and so on toward the prism system. In this way, a laser machining apparatus or the like can be implemented which can simultaneously irradiate the faces of the object to be processed with electromagnetic waves with accuracy without moving the object to be processed.