| 摘要 |
The present invention relates to a half tone mask and a manufacturing method of the same configured to have multiple half permeation units by using a single half permeation material, wherein the half tone mask comprises: a substrate; a transmissive area formed on the substrate for transmitting irradiated light of a predetermined wavelength range; and a half permeation area formed on the substrate with multiple half permeation units having a plurality of mutually different transmittances using the predetermined wavelength range according to thickness of the half permeation material or the number of stacked layers. |
