发明名称 計測方法、及び計測装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a plasma generation method and a plasma generation device in which laser beam-induced plasma of a high intensity and a large capacity can be generated under an easy control in atmospheric pressure by using a low-output laser beam. <P>SOLUTION: Light emitted from a light source 101 is condensed on a material P to which energy more than a breakdown threshold value is given, and electromagnetic waves are emitted by an electromagnetic wave oscillator 105 toward a light condensed position, and energy is supplied to the plasma generated by the light irradiation. The light and the electromagnetic wave are controlled in synchronization, and an irradiation timing of the light and an emitting timing of the electromagnetic wave are controlled. As a result, electrons are accelerated and the electrons collide with neutral atoms and the neutral atoms are ionized. The electrons generated by ionization work similarly and the ionization continues in an avalanche. As a result, an energy density in the plasma becomes high and the plasma is expanded. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP5651843(B2) 申请公布日期 2015.01.14
申请号 JP20070234799 申请日期 2007.09.10
申请人 发明人
分类号 H05H1/24;H05H1/00 主分类号 H05H1/24
代理机构 代理人
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