发明名称 フィルム基板の搬送装置
摘要 <p>The present invention provides a film substrate conveying device that is capable of adjusting, with a high degree of accuracy, the position of each of substrates conveyed in both a forward feed direction and a backward feed direction. The film substrate conveying device is a device for conveying a belt-like film substrate 2 while placing the film substrate 2 upright, with one end part thereof being on an upper side in a width direction thereof, this film substrate conveying device having: at least a pair of first grip rollers 6 that is disposed so as to sandwich an upper end part of the film substrate 2 therebetween; and a first angle adjusting mechanism 11 that is capable of adjusting an inclination direction and an inclination angle of the first grip rollers 6 so as to be able to incline a rotation angle of the first grip rollers 6 such that a rotation direction of the first grip rollers 6 is on an upper side with respect to a conveying direction.</p>
申请公布号 JP5652692(B2) 申请公布日期 2015.01.14
申请号 JP20090282865 申请日期 2009.12.14
申请人 发明人
分类号 C23C14/56;C23C16/54 主分类号 C23C14/56
代理机构 代理人
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