APPARATUS FOR RECEIVING WAFER FOR EXPOSURE APPARATUS

摘要

PURPOSE: An apparatus for receiving a wafer is provided to receive a wafer in a slot below a slot guide even when the wafer is caught in the slot guide as well as to reduce the loss of working time due to the inferiority of wafer sending. CONSTITUTION: An apparatus(100) receives a wafer(50) whose exposure process is completed in a wafer cassette(60). The apparatus includes: a belt driving part(10) which comprises a belt fixing block(14) and a plurality of pully installed on both sides of the belt fixing block and a belt(34) wound on the pully, and which receives the wafer in the wafer cassette arranged on an end part of the proceeding direction of the belt with the rotation of the belt according to the rotation of the pully; a belt supporting plate(20) which supports the belt fixing block, being installed on a bottom part of the belt fixing block; and an elastic part(40) which is installed between the belt fixing block and the belt supporting plate in a vertical direction as to the belt proceeding direction provides an elasticity to the belt fixing block.