| 摘要 |
<p>The present invention relates to a vapor drying apparatus. The vapor drying apparatus according to an embodiment of the present invention comprises: a chamber in which an object to be dried is stored; a vapor generating unit disposed on one side of the chamber to supply isopropyl alcohol (IPA) vapor to the chamber, wherein the IPA vapor is generated by being heated and mixed by diffusion of IPA solution and nitrogen gas; and a supply unit connected to the one side of the vapor generating unit to respectively supply the IPA solution and the nitrogen gas in order to fit for the mixing ratio.</p> |
