| 摘要 |
PROBLEM TO BE SOLVED: To obtain a fluoroscopic examination device which is relatively small and which can inexpensively obtain a fluoroscopic image of X-ray. SOLUTION: On an XY table 1,θtable 5 is constructed to be able to rotate±180 degrees, a substrate to be examined 2 is placed on theθtable 5, and a frame 7 is rotated at prescribed angles with this examination surface as the center. An X-ray is applied to the substrate 2 from an X-ray source 3 which is mounted on one end of the frame 7, a fluoroscopic image is photographed by a camera 4, and the quality of the substrate 2 is examined.
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