| 摘要 |
PROBLEM TO BE SOLVED: To provide a subject scanning speed determining apparatus capable of automatically setting the optimum scanning speed corresponding to the surface shape of a sample. SOLUTION: When preparatory scanning is started at a preparatory scanning speed Vp, a sampling part 303 samples the differential signal S2 outputted from a differential amplifier 12 at a predetermined cycle and a power spectrum converting part 304 calculates a power spectrum F showing the relation between the amplitude A of the surface of a sample and the spatial frequency S thereof on the basis of the sampling result. The frequency response characteristic G inherent to a scanner 1 is preliminarily stored in a frequency response characteristic memory part 305. A scanning speed determining part 306 compares the power spectrum F with the frequency response characteristic G to determine a scanning speed V on the basis of the comparison result.
|
