Pulse laser machining apparatus and pulse laser machining method

摘要

A pulse laser machining apparatus and method generates a clock signal, emits a pulse laser beam in synchronization with the clock signal, scans the pulse laser beam in synchronization with the clock signal only in a one-dimensional direction, moves a stage in a direction perpendicular to the one-dimensional direction, passes or cuts off the pulse laser beam in synchronization with the clock signal, and controls the passing or cutting off of the pulse laser beam based on the number of light pulses of the pulse laser beam.

主权项

1. A pulse laser machining apparatus comprising:
a reference clock oscillating circuit for generating a clock signal; a laser oscillator for emitting a pulse laser beam in synchronization with the clock signal; a laser beam scanner for scanning the pulse laser beam in synchronization with the clock signal only in a one-dimensional direction, the laser beam scanner including a rotary encoder and a laser beam scanner control unit, the rotary encoder transmitting a scan angle detected signal to the laser beam scanner control unit, the laser beam scanner control unit configured to output a scan angle signal based on the scan angle detected signal; a stage capable of holding an object to be machined thereon and moving in a direction perpendicular to the one-dimensional direction, the stage configured to be in a stationary state while the laser beam scanner scans the pulse laser beam; a pulse picker provided in an optical path between the laser oscillator and the laser beam scanner to pass/cutoff the pulse laser beam in synchronization with the clock signal; a pulse picker control unit for controlling the pulse picker on the basis of the number of light pulses of the pulse laser beam; a machining control unit configured to determine a timing of movement of the stage based on the scan angle signal, the machining control unit directing start of a movement of the stage when receiving the scan angle signal indicating an end of a scan of the pulse laser beam by the laser beam scanner; and a correction mechanism for correcting a machining origin point position for each scan on the basis of the scan angle detected signal, wherein the correction mechanism controls pass/cutoff of the pulse laser beam in the pulse picker on the basis of the scan angle detected signal.