Terahertz-infrared ellipsometer system, and method of use

摘要

The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including:
a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; anda detector such as a Golay cell; a bolometer or a solid state detector;

and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.

主权项

1. An ellipsometer or polarimeter system comprising:
a1) a polarization state generator comprising a THz source (S1) of electromagnetic radiation that provides substantially polarized output in a frequency range between about 300 GHz and extending to about 1 THz, wherein said polarization state generator further comprises an exit polarizer directly preceded by an odd-bounce polarization state rotation system, said exit polarizer and odd-bounce polarization state rotation system being rotationally functionally related so that said exit polarizer serves to purify the polarization state of electromagnetic radiation exiting the odd-bounce polarization state rotation system; and
wherein said THz source (S1) of electromagnetic radiation comprises at least one selection from the group consisting of:
a backward wave oscillator (BWO);a Smith-Purcell cell (SP); anda free electron laser (FE);and
a2) the polarization state generator further comprising an FTIR source (S2) of electromagnetic radiation which provides substantially polarized output in a frequency range above about 1.0 THz to about 1.4 THz; andsaid ellipsometer or polarimeter system further comprising:
b) a sample (S) support; c) a detector system (D1) (D2) (D3) of electromagnetic radiation comprising at least one selection from the group consisting of:
a golay cell (GC) detector; anda bolometer (BOL) detector;such that in use a functional combination of polarization state generator and detector is applied to cause electromagnetic radiation to impinge on and interact with a sample on said sample support (S), then enter said selected detector, to the end that said detector produces sample characterizing data.