发明名称 Capacitive sensor radiation measurement
摘要 A system that includes at least one capacitive sensor for least one angle of incidence component of radiation being measured striking the sensor. The measured capacitance of the sensor is affected by radiation striking the sensor. In some embodiments, the system includes multiple sensors where differences in the capacitive measurements of the sensors can be used to determine information about the radiation such as e.g. horizontal angle, directional angle, and dose.
申请公布号 US8933711(B2) 申请公布日期 2015.01.13
申请号 US201113228215 申请日期 2011.09.08
申请人 Freescale Semiconductor, Inc. 发明人 Hall Mark D.;Shroff Mehul D.
分类号 G01R27/26;G01T1/29 主分类号 G01R27/26
代理机构 代理人 Dolezal David G.;Geld Jonathan N.
主权项 1. A method for determining information regarding incident radiation on a radiation detector comprising a plurality of sensor regions, the method comprising: measuring a plurality of capacitances with circuitry, each capacitance of the plurality associated with radiation being measured striking a sensor region of the plurality of sensor regions, wherein for each sensor region of the plurality of sensor regions, the capacitance measured is dependent upon an angle of incidence of the radiation being measured striking the sensor region; determining with the circuitry, an angle of incidence component of the radiation using the plurality of measured capacitances; each of the plurality of sensor regions is configured as a pair of sensor regions with another sensor region of the plurality of sensor regions; each pair of sensor regions is located on a substrate, wherein a first pair is oriented at a first directional angle on the substrate and a second pair is oriented at a second directional angle on the substrate different from the first directional angle; wherein a third pair of sensor regions is oriented at a third directional angle on the substrate that is different than the second directional angle and the first directional angle.
地址 Austin TX US