发明名称 Flexible display device manufacturing method
摘要 A flexible display device manufacturing method includes preparing a substrate assembly in which a flexible substrate is formed on a carrier substrate; piling up a plurality of the prepared substrate assemblies in a heating furnace in multi-stages; performing heat treatment by providing hot blast onto each of the piled substrate assemblies in a horizontal direction; forming a display unit on the flexible substrate of the heat-treated substrate assembly; and separating the flexible substrate and the carrier substrate from each other. According to the above-described manufacturing method, since warpage of a flexible substrate after a carrier substrate and the flexible substrate are separated from each other may be suppressed, a subsequent process may be appropriately performed, productivity may be improved, and damage of products caused while the flexible substrate is handled may be reduced.
申请公布号 US8932899(B2) 申请公布日期 2015.01.13
申请号 US201313859335 申请日期 2013.04.09
申请人 Samsung Display Co., Ltd. 发明人 Choi Jung-Ho;Oh Sang-Hun;Kang Dong-Wook
分类号 H01L31/18;H01L31/042;H01L33/02;G06F1/16 主分类号 H01L31/18
代理机构 代理人 Bushnell, Esq. Robert E.
主权项 1. A flexible display device manufacturing method comprising: preparing a substrate assembly in which a flexible substrate is formed on a carrier substrate; vertically stacking a plurality of the prepared substrate assemblies in a heating furnace in multi-stages, said plurality of the prepared substrate assemblies being positioned one above another; performing heat treatment by providing hot blast, in which a temperature of the hot blast is gradually increased, onto each of the vertically stacked substrate assemblies in a horizontal direction in a space between adjacent vertically stacked substrate assemblies; forming a display unit on the flexible substrate of the heat-treated substrate assembly; and separating the flexible substrate and the carrier substrate from each other.
地址 Giheung-Gu, Yongin, Gyeonggi-Do KR