Optical imaging with reduced immersion liquid evaporation effects

摘要

An optical arrangement for use in an optical imaging process includes an optical element, an immersion zone and a liquid repelling device. During the optical imaging process, the immersion zone is located adjacent to the optical element and is filled with an immersion liquid. The optical element has a first surface region and a second surface region. During the optical imaging process, the first surface region is wetted by the immersion liquid. At least temporarily during the optical imaging process, the liquid repelling device generates an electrical field in the region of the second surface. The electrical field being is adapted to cause a repellent force on parts of the immersion liquid which are responsive to the electrical field and inadvertently contact the second surface region. The repellent force has a direction to drive away the parts of the immersion liquid from the second surface region.

主权项

1. An optical arrangement having an immersion zone, the optical arrangement comprising:
an optical element having a first surface region and a second surface region; and a liquid repelling device comprising a liquid repelling component located at the second surface region of the optical element, the liquid repelling device being configured to generate an electric field in a region of liquid repelling component, wherein during use of the optical arrangement in an optical imaging process:
the immersion zone of the optical arrangement is adjacent the optical element;the immersion zone contains immersion liquid;the first surface region of the optical element is wetted by the immersion liquid;in an operation state of the optical arrangement, the liquid repelling component contacts immersion liquid;in the operation state of the optical arrangement, at least temporarily, the liquid repelling device generates the electrical field in the region of the liquid repelling component; andthe electrical field in the region of the liquid repelling component drives immersion liquid contacting the liquid repelling component away from the liquid repelling component.