Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof

摘要

A combined probe head being disposed in a space transformer of a vertical probe card is provided, in which the combined probe head is used for differentiating or segmenting a layout area of the probes in the vertical probe card. The combined probe head may include a locating plate and sub-probe heads. The locating plate may include fixed portions. Each sub-probe head may include corresponding sub-dies and probes inserted between the sub-dies, and each sub-probe head is assembled and fixed in the corresponding fixed portion. Therefore, the layout area of the probes in the vertical probe card can be respectively differentiated or segmented from the sub-probe heads in order to avoid mutual interference under repair process. In addition, a related method for assembling and aligning the above mentioned combined probe head is provided.

主权项

1. A combined probe head, being disposed in a space transformer of a vertical probe card, the combined probe head comprises:
a locating plate, comprising a plurality of fixed portions and a support beam structure, wherein the fixed portions are defined by the support beam structure; and a plurality of sub-probe heads, the sub-probe heads are disposed in horizontal alignment with each other, wherein each sub-probe head comprises: an upper sub-die, a lower sub-die, and a plurality of probes being inserted between the upper sub-die and the lower sub-die, and each sub-probe head is assembled and fixed in the corresponding fixed portion; the sub-probe head further comprises: a middle sub-die, wherein for each sub-probe head, the middle sub-die is disposed between the upper sub-die and the lower sub-die.