| 摘要 |
The invention includes an x-ray goniometer positionable directly adjacent to processing machines used in the cutting, milling, drilling and shaping of crystal boules and crystal ingots, used in conjunction with an adjustable tilt platform capable of pitch, yaw and roll movement, allowing in-situ measurement and automatic adjustment of crystal orientation with respect to the processing machine. The goniometer may be secured to the tool or a portion of the machine which is adjacent the piece to be worked. Various embodiments include an x-ray goniometer and adjustable tilt platform incorporated into a core drilling machine, saw, surface grinder, polishing apparatus, or orientation flat or notch grinder. Incorporating an x-ray goniometer and adjustable tilt platform directly into a crystal processing machine results in a decrease in overall processing time and labor, and a significant increase in precision when processing crystal ingots into a final product, such as a notched wafer. |
