| 摘要 |
<p>A MEMS device according to the present invention includes a mass body; a flexible part with a first flexible part in contact with one surface of the mass body and a second flexible part in contact with the other surface of the mass body; and a support part to which the end of the flexible part is fixed to float the mass body. A piezoelectric body or a piezoresistor is formed on one surface of the flexible part.</p> |
