| 发明名称 |
BOND HEADS FOR THERMOCOMPRESSION BONDERS, THERMOCOMPRESSION BONDERS, AND METHODS OF OPERATING THE SAME |
| 摘要 |
A bond head for a thermocompression bonder is provided. The bond head includes a tool to hold a workpiece to be bonded, a heater to heat the workpiece to be bonded, and a chamber at a proximity of the heater. The chamber receives a cooling fluid for cooling the heater. |
| 申请公布号 |
KR20150004288(A) |
申请公布日期 |
2015.01.12 |
| 申请号 |
KR20140081887 |
申请日期 |
2014.07.01 |
| 申请人 |
KULICKE AND SOFFA INDUSTRIES, INC. |
发明人 |
WASSERMAN MATTHEW B.;SCHMIDT LANGE MICHAEL P. |
| 分类号 |
H01L21/603 |
主分类号 |
H01L21/603 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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