| 摘要 |
<p>The invention relates to a plasma power supply arrangement (10) having a plurality of power supply units (16 - 18), said power supply units (16 - 18) each comprising: a. an alternating signal generator (30, 31), b. a modulator (40, 41) modulating the alternating signal (50, 51) generated by the alternating signal generator (30, 31) using at least one modulation signal (52, 57, 60, 63, 66, 69, 72, 75, 76), c. a modulation signal input (44, 45) connected to the modulator (40, 41), d. a modulation signal output (42, 43) connected to at least one modulation input (44, 45) of another power supply unit.</p> |
