发明名称 MICROMECHANICAL COMPONENT HAVING A THIN LAYER CAP
摘要 <p>A micromechanical component having a substrate, a micromechanical functional layer situated above the substrate, and an encapsulation layer situated above the functional layer, and a method for producing the micromechanical component are provided, the encapsulation layer having at least one trench, and a bridging of the trench by at least one electrically insulating connection link is provided.</p>
申请公布号 KR101479363(B1) 申请公布日期 2015.01.12
申请号 KR20097024933 申请日期 2008.05.19
申请人 发明人
分类号 B81B7/00;B81C1/00 主分类号 B81B7/00
代理机构 代理人
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