APPARATUS FOR ELIMINATING AND COLLECTING PARTICLES BY CONTROLLING TEMPERATURE

摘要

PURPOSE: An apparatus for eliminating and collecting particles is provided to overcome the limitation of a mechanical particle control method, by artificially making a temperature gradient corresponding to the particles. CONSTITUTION: A thermoelement particle collecting unit is installed in a main process chamber(110), electrically separated form the main process chamber. A power supply terminal unit supplies power to the particle collecting unit to make the particle collecting unit function as a heating element or cooling element which is a thermoelement characteristic. An optimum power supply unit supplies an optimum temperature gradient to the particle collecting unit to efficiently collect the particles.