CRUCIBLE FOR PULLING SEMICONDUCTOR SILICON, ALMOST FREE FROM VIBRATION AT LIQUID SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a quartz crucible almost free from the vibration at liquid surface and capable of being practically used. SOLUTION: The vibration at the liquid surface can be suppressed by providing a crucible for pulling a semiconductor silicon, which crucible is such one that the weight loss is <=0.013 g when 0.125 to 0.130 g of silicon is mounted on a cut sample of the crucible, then the sample and silicon are kept at 1,500 deg.C in gaseous Ar for 30 min under normal pressure and the formed SiO2 vapor is removed.