| 摘要 |
FIELD: measurement equipment.SUBSTANCE: invention refers to measurement equipment, in particular to methods of object surface scanning using scanning probe microscope, and may be used for determination of relief change, linear dimensions and physical characteristics of object surface under passage of electric current. According to scanning method, before object mounting on piezoscanner its surface is preliminary divided in at least two parts, electric current passes through at least one part of surface, then simultaneously both parts - with and without electric current passage - are scanned.EFFECT: improving scanning efficiency without use of special current-conducting probes.2 dwg |
