发明名称 NITRIDE BASED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF
摘要 <p>Disclosed is a nitride based semiconductor device. A nitride based semiconductor device according to the present invention includes a first nitride layer which operates as a drain doped by a predetermined first doping, a second nitride layer which is arranged in the upper part of the first nitride layer and includes a 2-dimensional electron gas (2DEG) layer, a third nitride layer which is arranged in the upper part of the second nitride layer by alternately performing the first doping and a second doping different from the first doping, a forth nitride layer which is arranged in the upper part of the third nitride layer and includes a 2-dimensional electron gas layer, and a gate electrode arranged on the third nitride layer.</p>
申请公布号 KR101480068(B1) 申请公布日期 2015.01.09
申请号 KR20130124511 申请日期 2013.10.18
申请人 发明人
分类号 H01L29/778;H01L21/335 主分类号 H01L29/778
代理机构 代理人
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