发明名称 EPITAXY SUBSTRATE, METHOD FOR PRODUCING AN EPITAXY SUBSTRATE AND OPTOELECTRONIC SEMICONDUCTOR CHIP COMPRISING AN EPITAXY SUBSTRATE
摘要 An epitaxy substrate (11, 12, 13) for a nitride compound semiconductor material is specified, which has a nucleation layer (2) directly on a substrate (1) wherein the nucleation layer (2) has at least one first layer (21) composed of AlON with a column structure. A method for producing an epitaxy substrate and an optoelectronic semiconductor chip comprising an epitaxy substrate are furthermore specified.
申请公布号 KR20150003788(A) 申请公布日期 2015.01.09
申请号 KR20147030905 申请日期 2013.04.24
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 HERTKORN JOACHIM;FREY ALEXANDER;SCHMID CHRISTIAN
分类号 H01L21/20;H01L21/02 主分类号 H01L21/20
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