| 摘要 |
An X-ray inspection method which is capable of measuring a shape of an inspection object at a high speed in a non-destructive manner is provided. The X-ray inspection method includes: a simulation image generating process of generating simulation images of a plurality of transmission images having different shape parameters of an inspection object; an X-ray imaging process of capturing an X-ray transmission image transmitting the inspection object; and a shape estimating process of estimating a shape parameter of a simulation image whose evaluation value indicating a similarity with the X-ray transmission image satisfies predetermined conditions among the plurality of simulation images, as a shape of the inspection object. |
