ENHANCED SELENIUM SUPPLY IN COPPER INDIUM GALLIUM SELENIDE PROCESSES

摘要

A system for depositing selenium on a substrate comprises includes a substrate carrier including a body, means for holding the substrate, and a plurality of selenium vapor outlets formed in the body to direct a flux of selenium vapor onto the substrate. A selenium supply container provides selenium vapor to the selenium vapor outlets. At least one temperature sensor is coupled to the substrate carrier to sense temperature of the substrate. A heat source is positioned to heat the substrate. A controller is coupled to the temperature sensor and the heat source.

主权项

1. A substrate carrier, which comprises:
a body including a back plate and a pair of spaced apart, substantially parallel, side rails on the back plate, each side rail including an inwardly facing surface extending outwardly of the back plate; and, a longitudinally extending engagement slot formed in the inwardly facing surface of each side rail adjacent the back plate to engage and hold the substrate in proximity to the back plate.