| 发明名称 |
REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELENGTH RANGE |
| 摘要 |
An optical element comprises a reflecting coating on a substrate. The reflecting coating contains boron and can have a thickness of more than 50 nm. |
| 申请公布号 |
US2015009480(A1) |
申请公布日期 |
2015.01.08 |
| 申请号 |
US201414321149 |
申请日期 |
2014.07.01 |
| 申请人 |
Carl Zeiss Laser Optics GmbH |
发明人 |
Shklover Vitaliy |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. An optical element, comprising:
a substrate; and a reflecting coating supported by the substrate, wherein the reflecting coating comprises boron, and the reflecting coating has a thickness of more than 50 nm. |
| 地址 |
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