| 发明名称 |
METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE OF SILICA GLASS CRUCIBLE, AND METHOD FOR PRODUCING MONOCRYSTALLINE SILICON |
| 摘要 |
A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided. |
| 申请公布号 |
US2015007764(A1) |
申请公布日期 |
2015.01.08 |
| 申请号 |
US201214365544 |
申请日期 |
2012.10.31 |
| 申请人 |
SUMCO CORPORATION |
发明人 |
Sudo Toshiaki;Sato Tadahiro;Kitahara Ken |
| 分类号 |
G01B11/24;C30B29/06;C30B15/20;H01L21/66;C30B15/10 |
主分类号 |
G01B11/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for measuring a three-dimensional shape of a vitreous silica crucible, comprising the steps of:
forming a fog onto an inner surface of the vitreous silica crucible, measuring a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light. |
| 地址 |
Minato-ku, Tokyo JP |
