Al-N-BASED LIGHT ABSORBER AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an Al-N-based light absorber having good fixability and a low material cost and capable of exhibiting high absorption in a wide band and to provide a method for producing the absorber. SOLUTION: A film 4 of <=1μm thickness which absorbs almost all of light in the ultraviolet, visible and near infrared wavelength regions is deposited by using a parallel flat plate type sputtering apparatus with Al as a target material, using a gaseous Ar-N2 mixture as a sputtering gas 3 and controlling the mixing ratio and deposition time (film thickness).