ELECTRONIC DEVICE INSULATING LAYER, AND METHOD FOR PRODUCING ELECTRONIC DEVICE INSULATING LAYER

摘要

An object of the present invention is to provide an electronic device insulating layer which may improve characteristics of an electronic device. The means for solving the object is an electronic device insulating layer comprising a first insulating layer formed from a first insulating layer material and a second insulating layer formed on the first insulating layer from a second insulating layer material, the first insulating layer material being an insulating layer material comprising a photosensitive resin material (A), a tungsten (V) alkoxide (B) and a basic compound (C), the second insulating layer material being an insulating layer material comprising a polymer compound (D) which contains a repeating unit containing a cyclic ether structure and a repeating unit having an organic group capable of producing a phenolic hydroxyl group by the action of an acid.

主权项

1. An electronic device insulating layer comprising a first insulating layer formed from a first insulating layer material and a second insulating layer formed on the first insulating layer from a second insulating layer material,
the first insulating layer material is a material containing: a photosensitive resin material (A); and a tungsten (V) alkoxide (B), the second insulating layer material is a material containing a polymer compound (D) which contains: a repeating unit containing a cyclic ether structure; and a repeating unit represented by the formula (1): wherein R1 represents a hydrogen atom or a methyl group; RA represents a linking moiety which links the main chain of the polymer compound with a side chain of the polymer compound and optionally has a fluorine atom; R represents an organic group capable of being detached by an acid; R′ represents a hydrogen atom or a monovalent organic group having from 1 to 20 carbon atoms; a hydrogen atom in the monovalent organic group having from 1 to 20 carbon atoms may have been substituted with a fluorine atom; p1 represents an integer of 0 or 1, and p2 represents an integer of 1 to 5; when there are two or more Rs, they may be the same or different; when there are two or more R's, they may be the same or different.