| 摘要 |
<p>Disclosed is a cluster-batch type substrate processing system. According to the present invention, the cluster-batch type substrate processing system includes: a substrate in-transport portion (1) into which a substrate (40) is transported; a plurality of batch-type substrate processing devices (9: 9a, 9b, 9c, 9d) which are horizontally arranged along an arrangement path (P) and are arranged on one side or on both sides from the arrangement path (P); and a substrate transport robot (7) moved along the arrangement path (P) from the substrate in-transport portion (1), and performs substrate (40) loading/unloading on the batch-type substrate processing devices (9: 9a, 9b, 9c, 9d).</p> |
