| 摘要 |
PROBLEM TO BE SOLVED: To prevent breakdown of a diaphragm structure when it is pressed onto a metal mold, in a thermal type flowmeter configured to include a resin part formed near the diaphragm structure using the metal mold.SOLUTION: In the method of manufacturing a thermal type flowmeter, a gas flow rate measurement element 200 is supported on support members 102b and 111, and a resin part 104 formed by molding covers the gas flow rate measurement element 200 and the support members 102b and 111. The gas flow rate measurement element 200 includes; a cavity part 202 surrounded with a substrate inclination part 202a inclined with respect to a substrate surface; a diaphragm 201 covering the cavity part; and an electric resistor formed in the diaphragm 201. The metal mold 14 is set so that the action part of the pressing force by the metal mold for molding the resin part 104 is located outside the substrate inclination part 202a on the whole circumference of the diaphragm 201. |
