发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device that can be miniaturized or highly integrated.SOLUTION: A first trench and a second trench are formed in an insulation layer. A transistor having an oxide semiconductor layer in the first trench is formed, and a capacitive element is formed to overlap with the second trench. A first gate electrode is formed in an upper layer of the first trench, and a second gate electrode is formed in a lower layer of the first trench. It is possible to increase the capacitance value of the capacitive element without increasing the occupied area in a planer view because the capacitive element is formed to overlap with the second trench. |
申请公布号 |
JP2015005738(A) |
申请公布日期 |
2015.01.08 |
申请号 |
JP20140103964 |
申请日期 |
2014.05.20 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;TANAKA TETSUHIRO;UOJI HIDEKI |
分类号 |
H01L29/786;H01L21/336;H01L21/762;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8242;H01L27/04;H01L27/06;H01L27/088;H01L27/092;H01L27/10;H01L27/105;H01L27/108 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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