发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that can be miniaturized or highly integrated.SOLUTION: A first trench and a second trench are formed in an insulation layer. A transistor having an oxide semiconductor layer in the first trench is formed, and a capacitive element is formed to overlap with the second trench. A first gate electrode is formed in an upper layer of the first trench, and a second gate electrode is formed in a lower layer of the first trench. It is possible to increase the capacitance value of the capacitive element without increasing the occupied area in a planer view because the capacitive element is formed to overlap with the second trench.
申请公布号 JP2015005738(A) 申请公布日期 2015.01.08
申请号 JP20140103964 申请日期 2014.05.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;TANAKA TETSUHIRO;UOJI HIDEKI
分类号 H01L29/786;H01L21/336;H01L21/762;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8242;H01L27/04;H01L27/06;H01L27/088;H01L27/092;H01L27/10;H01L27/105;H01L27/108 主分类号 H01L29/786
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