| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a scanning probe microscope which is downsized by adopting an optical lever system, reduces influence of vibration noise, and enables easy initial optical adjustment.SOLUTION: A scanning probe microscope adopts an optical lever system which includes a cantilever 1 having a probe 3 at a tip, and detects movement of the cantilever 1 by a force exerting between the tip of the probe 3 and a material surface using irradiation light from a light source. The light source is provided at the tip of the cantilever 1. The irradiation light from the light source is irradiated toward a split photodiode 6.</p> |
