发明名称 RECORDING HEAD AND MANUFACTURING METHOD FOR THE SAME AND RECORDING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a recording head in which an ink supply port can be favorably formed.SOLUTION: There is provided a manufacturing method for a recording head which is provided on a first surface of a substrate and has a recording portion for performing recording on a record medium and an ink supply port that is provided penetrating from the first surface of the substrate through a second surface opposite to the first surface and supplies ink to the recording portion, the method including the steps of: forming a first protective film that covers at least the second surface and a lateral surface of the substrate and has an opening corresponding to a position at which the ink supply port is arranged; forming the recording portion on the first surface side of the substrate; forming a second protective film that covers a portion which covers the lateral surface of the substrate of the first protective film and the recording portion; and removing a part of the substrate by performing etching from the second surface side via the opening of the first protective film, where the bonding strength between the first protective film and the substrate is greater than the bonding strength between a material contained in the second protective film and the substrate.</p>
申请公布号 JP2015003444(A) 申请公布日期 2015.01.08
申请号 JP20130130001 申请日期 2013.06.20
申请人 CANON INC 发明人 SATO TAKAHIRO;KURITA NORIYUKI;SASAKI KEIICHI
分类号 B41J2/16;B41J2/05 主分类号 B41J2/16
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