发明名称 DOUBLE PATTERNING TECHNOLOGY (DPT) LAYOUT ROUTING
摘要 One or more techniques or systems for determining double patterning technology (DPT) layout routing compliance are provided herein. For example, a layout routing component of a system is configured to assign a pin loop value to a pin loop. In some embodiments, the pin loop value is assigned based on a mask assignment of a pin of the pin loop. In some embodiments, the pin loop value is assigned based on a number of nodes associated with the pin loop. DPT compliance or a DPT violation is determined for the pin loop based on the pin loop value. In this manner, odd loop detection associated with DPT layout routing is provided because a DPT violation results in generation of an additional instance of a net, for example. Detecting an odd loop allows a design to be redesigned before fabrication, where the odd loop would present undesired issues.
申请公布号 US2015012895(A1) 申请公布日期 2015.01.08
申请号 US201414496053 申请日期 2014.09.25
申请人 Taiwan Semiconductor Manufacturing Company Limited 发明人 Chen Huang-Yu;Fan Fang-Yu;Hou Yuan-Te;Chen Wen-Hao;Wang Chung-Hsing;Cheng Yi-Kan
分类号 G06F17/50 主分类号 G06F17/50
代理机构 代理人
主权项 1. A system for determining double patterning technology (DPT) layout routing compliance, comprising: a layout routing component configured to: create a first pin group comprising a first set of one or more pre-colored pins that are linked together by a first set of internal conflict spaces;associate the first pin group with a first phantom assisted feature (AF) mask polygon, the associating comprising: selecting a first pre-colored pin from the first set of one or more pre-colored pins;determining a first mask assignment associated with the first pre-colored pin; andassigning the first phantom AF mask polygon to a different mask than a mask for the first pre-colored pin according to the first mask assignment;create a pin loop based on the first pre-colored pin and the phantom AF mask polygon;assign a pin loop value to the pin loop; anddetermine whether a double patterning technology (DPT) violation is present for the pin loop based on the pin loop value.
地址 Hsin-Chu TW