发明名称 SOLID-STATE IMAGE SENSOR AND IMAGING SYSTEM
摘要 At least one exemplary embodiment is directed to a solid state image sensor including at least one antireflective layer and/or non rectangular shaped wiring layer cross section to reduce dark currents and 1/f noise.
申请公布号 US2015008494(A1) 申请公布日期 2015.01.08
申请号 US201414495745 申请日期 2014.09.24
申请人 CANON KABUSHIKI KAISHA 发明人 Koizumi Toru;Okita Akira;Itano Tetsuya;Hashimoto Sakae;Mishima Ryuichi
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项 1. A CMOS image sensor including a pixel region including a plurality of pixels, and a circuit region, the pixel region comprising: a light-receiving section arranged in a substrate; a wiring structure arranged above the substrate, and including a plurality of wiring layers and a plurality of interlayer insulating layers; a first layer comprising Si and O, and arranged between the light-receiving section and the wiring structure; a second layer comprising Si and N, and arranged between the first layer and the wiring structure; a third layer comprising Si, N and O above an upper most interlayer insulating layer of the plurality of interlayer insulating layers, and a fourth layer comprising Si and N, arranged above the third layer and has a concentration of N more than that in the third layer.
地址 Tokyo JP