Electron Beam Data Storage System and Method for High Volume Manufacturing

摘要

The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.

主权项

1. A particle beam apparatus comprising:
a particle beam source operable to generate at least one particle beam; a beam controller operable to selectively expose portions of a substrate to the at least one particle beam in response to a write instruction; and a data processing module operable to:
receive a design layout;generate a lookup table mapping a plurality of instances of a repeating pattern in the design layout to a single representation of the repeating pattern to thereby reduce a data size of the design layout; andgenerate the write instruction based on the lookup table.