| 摘要 |
The invention relates to a micro pilot valve 1, which is characterized by a micro cavity 2, which is connected with valve outlet 3, a first micro opening 4 between micro cavity 2 and a first pressure level 5, a second micro opening 6 between micro cavity 2 and a second pressure level 7, a sealing element 8 within micro cavity 2, which is movable between the micro openings, and which in a first end position closes micro opening 4 and in a second end position micro opening 6, whereas the control pressure in the first end position adopts the value of the second pressure level 7 and in the second end position the value of the first pressure level 5, and a micro actuator 10, which actuates sealing element 8 via a transfer element, which protrudes at least through one of the micro openings. |
