LIGHT SOURCE DEVICE, AND LITHOGRAPHIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To solve the following problem that an influence exerted by a shadow flux generated by a shadow caused by a light source itself and existing in the output of the light source has to be reduced when a plurality of luminous fluxes are acquired from the light source.SOLUTION: A light source device includes: a light source unit that emits a luminous flux having a shadow part in a central area; a separation unit that separates the luminous flux from the light source unit into a plurality of luminous fluxes including two or more luminous fluxes having no shadow part in the central area; and a light guide unit that guides each of the two or more luminous fluxes from the separation unit.