METHOD FOR CONDITIONING OF A GALVANIC ELECTROLYTE AND ACTIVATION OF ELECTRODES PRIOR TO THE START OF A GALVANIC METAL DEPOSITION PROCESS

摘要

The present invention is related to a method for conditioning of a galvanic electrolyte and for activation of electrodes of a galvanic device for galvanic metal, in particular copper, deposition on a substrate to be treated, which comprises at least a reaction container filled with such a galvanic electrolyte having the following method steps: i) Providing a device for conditioning of a galvanic electrolyte and for activation of electrodes comprising at least a first reaction tank, which is filled with such a galvanic electrolyte, at least a first anode, at least a first cathode, at least a rectifier for adjusting and/or controlling direct current or alternating current, at least a current source, at least an electrical connection for said electrodes, a circular pump system for circulating the electrolyte via at least a first and at least a second connection between the reaction container of the galvanic device and the first reaction tank of the device for conditioning and activation; ii) Connect the device to the respective galvanic device by at least a first and at least a second connection; iii) Start circulating the electrolyte between the first reaction tank of the device and the reaction container of the respective galvanic device by a circular pump system via the at least first and second connection; iv) Start conditioning of the galvanic electrolyte and activation of the electrodes, which are located in the reaction container of the respective galvanic device, by applying current to the electrodes of the device; v) Generate decomposition products of galvanic electrolyte components in the device prior to the start of the galvanic metal deposition process in the galvanic device itself; vi) Circulate the generated decomposition products of galvanic electrolyte components between the device and the galvanic device by the circular pump system; vii) Finish applying current to the electrodes of the device; viii) Terminate running of the circular pump system and disconnect the device from the respective galvanic device.