摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing leak current flowing from a fuse electrode to a substrate.SOLUTION: A semiconductor device comprises: a semiconductor substrate including a pillar; an element isolation body formed adjacent to a part of a side surface of the pillar; an epitaxial layer formed on the pillar; a first contact plug which supplies a first voltage to the epitaxial layer; a fuse electrode formed along a surface except the part of the side surface of the epitaxial layer; a fuse insulating film formed between the fuse electrode and the pillar; and a second contact plug electrically connected to the fuse electrode and supplying a second voltage to the same electrode.</p> |