EUV DISCHARGE LAMP DEVICE HAVING OPERATION PROTECTION COMPONENT, AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device for generating EUV radiation and/or a soft X-ray by electrically operated discharge.SOLUTION: A metal or molten metal is provided on a plane near a discharge gap, and is evaporated by an energy beam (4). For this, a gas medium is generated for plasma ignition. To cover at least another opening (14), a protection component (13) is disposed and formed between components having different potential during operation. The protection component (13) is operated during the operation of the device. This operation causes a reduced local thermal load on the protection component.