发明名称 COATING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a coating method where defects caused by the ununiformity of coating due to the separation of a coating liquid can be sufficiently reduced and which is extremely useful for forming a high quality coating film on a substrate while the method is excellent in practicality and simple.SOLUTION: In a coating method where a coating device having a liquid reservoir to store a coating liquid is used and the surface of a substrate is coated with the coating liquid, the coating liquid contains a non-hygroscopic solvent.</p>
申请公布号 JP2015003314(A) 申请公布日期 2015.01.08
申请号 JP20130131574 申请日期 2013.06.24
申请人 HITACHI CHEMICAL CO LTD 发明人 KATO TAKATOSHI;TAMAOKI TAKESHI;YAHARA MASAHIRO
分类号 B05D7/24;B05D1/28 主分类号 B05D7/24
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