| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment technology which conducts high temperature thermal treatment to a heated body having a large diameter in a clean atmosphere.SOLUTION: A thermal treatment device of the invention includes: a device body 2; a reaction tube 3 into which a reaction gas may be introduced, the reaction tube 3 which is formed into an elongated shape in the device body 2, houses a planar heated body 21, and has light permeability; and light radiation heating means disposed at a position in the device body 2 which is located outside the reaction tube 3 and including lamps which radiates light to the heated body 21 to heat the heated body 21. The reaction tube 3 is made of quartz, and a longitudinal cross sectional shape of the reaction tube 3 is formed into an elliptical shape. |
